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By certification 
Product Name: Hexafluoro-1,3-Butadiene
CAS NO.: 685-63-2
Synonyms: 1,1,2,3,4,4-hexafluorobuta-1,3-diene
Molecular Formula: C4F6
Molecular Weight: 162.00
Appearance: Colorless and odorless crystal clear gas
Purity: 99.95%
Usage: Semiconductor plasma etching, excellent dry etching gas. Fluorinated rubber, synthetic fluorinated elastomers and resins with excellent electrical properties
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